MEMS

Microelectromechanical systems (MEMS) is the technology of microscopic devices with moving parts. They merge at the nanoscale into nanoelectromechanical systems (NEMS) and nanotechnology.

They usually consist of a central unit that processes data (an integrated circuit chip such as microprocessor) and several components that interact with the surroundings (such as sensors).

MEMS sensor generations:


 * 1st Generation - mostly based on a silicon structure
 * 2nd Generation - analog-to-digital converter on one chip
 * 3rd Generation - fusion of analog amplification, analog-to-digital converter and digital intelligence on one chip
 * 4th Generation - memory cells and temperature compensation data are added to the 3rd generation

Some applications:


 * Inkjet printers, which use piezoelectrics or thermal bubble ejection to deposit ink on paper.
 * Accelerometers in cars and consumer electronics devices such as game controllers, smartphones, digital cameras and PCs to park the hard disk head when free-fall is detected to prevent damage and data loss.
 * Microphones in smartphones, wearable devices, smart home and automotive applications.
 * Microoptoelectromechanical systems (MOEMS), also known as optical MEMS, are integrations of mechanical, optical, and electrical systems. Used for optical switching technology.
 * Medical technologies such as biosensor or chemosensor, or embedded in medical devices e.g. stents.
 * Interferometric modulator display (IMOD) applications in consumer electronics
 * Speakers in earphones and hearing aids
 * Oscillators
 * Probe microscopes and atomic force microscopes
 * Smart dust is a system of many sensors, robots, or other devices, that can detect light, temperature, vibration, magnetism, or chemicals.
 * Neural dust are wirelessly powered nerve sensors used as brain–computer interfaces. The sensors may be used to study, monitor, or control the nerves and muscles and to remotely monitor neural activity. A medical treatment could introduce thousands of neural dust devices into human brains.
 * Carbon nanotubes act as interconnects as well as transistors to serve as electrical components of NEMS.
 * Millipede memory, with data density of more than 1 terabit per square inch, is used in flash media.